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Paul Scherrer Institut PSI Laboratory for Micro- and Nanotechnology
   Paul Scherrer Institut CH-5232 Villigen PSI Phone +41 56 310 28 14 Fax +41 56 310 26 46



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Nanojunction lab

Nanoimprint lithography

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XIL facility at the SLS

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Updated:
11.02.2008
E-Mail: celestino.padeste@psi.ch

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LMN Facilities and Equipment

 
Lab for Micro- and Nanotechnology, PSI

Laboratories    

ceanroom: 170 sqm net clean area (hybrid class 10/class 1000); processesing lab: semi-clean room of ca. 150 sqm

 UHV system for sample preparation and analysis
Cleanroom Labs Nanojunction Lab Chemistry Labs

Facilities and Equipment 		   
extreme ultraviolet interference lithography nanoimprint lithography E-beam lithography
XIL facility at the SLS Nanoimprint Lithography E-Beam Lithography
     
Our new Zeiss Supra 55VP Scanning Probe Microscopy (SPM) and SPM Service Lab  
Scanning Electron Microscopy Scanning Probe Microscopy